PSM1000
The PSM1000 is an OEM-ready microscope with the best possible imaging performance on flat, reflective samples. Metallurgical workpieces as well as semiconductors are impressively reproduced by the plan-apochromatic LWD lenses. The large field of view with an upright image allows quick orientation and easy manipulation. Each position of the nosepiece can be centered individually. As a result, details remain perfectly “in the picture” when the magnification is changed. The use of optional lenses with parfocality compensation also saves refocusing. The high transmission of the lenses including tube lenses for NUV (355nm) to NIR (1064nm) allows the PSM1000 to be integrated into wafer inspection systems. The small increments of the fine focus enable the finest adjustment of the focus level, even with high magnifications.
Specifications standard system:
Optics concept: optics with transmission from NUV to NIR
Observation tube: Trinocular tube, Siedentopf type
Viewing angle: 30º viewing angle
Beam splitting with trinotube: switchable 50:50/0:100 visual: camera output
Eye relief: 55-75mm
Diopter compensation: +/- 5 dpt on both eyepieces
Eyepieces: wide field WF10X/24mm, with diopter compensation
Intermediate tube: 3-fold tube lens turret with 1X UV/VIS (355-532nm), 1X IR/VIS (532-1064nm), 2X
Objective turret: 4x, positions can be centered individually
Grade lenses: Extra LWD Plan Apochromate
Lenses/magnification range: Optional
Lens thread: M26X0.706
Tripod Type: Optional
Focus: Coaxial coarse/fine drive, adjustable speed
Fine focus increment: 1 μm increment
Travel range in Z: 50mm
Reflected light: Port for coupling a coaxial illumination
Accessories included: Laser safety accessories, spacers
Dimensions: LxWxH 333x218x277mm
